Temperature-dependent Raman spectroscopic studies of AlN epi-films by metal-organic chemical vapor deposition
Abstract
Temperature-dependent Raman scattering measurements are performed over the range of 80–810 K, and an investigation is conducted on two AlN epitaxial films (1.8 and 3.7 μm) grown on sapphire by metal-organic chemical vapor deposition. Simulations are carried out for the AlN phonon modes of E2(high) by the space correlation model and A1(LO) by longitudinal optical phonon and plasma coupling over the range of 80–810 K. Temperature-dependent values of carrier concentration, electron mobility, crystalline perfection degrees, and biaxial stress along the film growth direction are acquired. Their graphical variations and formulized polynomial descriptions are presented. Different from traditional Hall and C–V electrical measurements, our method of using an optical technique for determining high-temperature carrier concentration and mobility along the epitaxial direction nondestructively may provide a useful method for the research and development of AlN and other semiconductors.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (9)
Yanlian Yang
CAS Key Laboratory of Biological Effects of Nanomaterials and Nanosafety, CAS Key Laboratory of Standardization and Measurement for Nanotechnology, CAS Center for Excellence in Nanoscience, National Center for Nanoscience and Technology
Manika Tun Nafisa
Southern Polytechnic College of Engineering and Engineering Technology, Kennesaw State University 2 , Marietta, Georgia 30060,
Zhe Chuan Feng
Southern Polytechnic College of Engineering and Engineering Technology, Kennesaw State University 2 , Marietta, Georgia 30060,
Lianshan Wang
Research Center for Optoelectronics Materials and Devices, Guangxi Key Laboratory for the Relativistic Astrophysics, School of Physical Science and Technology, Guangxi University 1 , Nanning 530004,
Jeffrey Yiin
Southern Polytechnic College of Engineering and Engineering Technology, Kennesaw State University 2 , Marietta, Georgia 30060,
Lingyu Wan
Benjamin Klein
Southern Polytechnic College of Engineering and Engineering Technology, Kennesaw State University 2 , Marietta, Georgia 30060,
Ian T. Ferguson
Southern Polytechnic College of Engineering and Engineering Technology, Kennesaw State University 2 , Marietta, Georgia 30060,
Wenhong Sun
Research Center for Optoelectronic Materials and Devices, Guangxi Key Laboratory for the Relativistic Astrophysics, Guangxi University 1 , Nanning 530004,