Silicon nitride integrated electro-optic absorption modulator
Abstract
Silicon nitride (SiN) is currently the most prominent platform for photonics in the visible and near-IR wavelength bandwidth. However, realizing fast electro-optic modulators, the key components of any integrated optics platform remain challenging in SiN. Recently, transparent conductive oxides have emerged as a promising platform for photonic integrated circuits. In this work, we take an important step toward combining the advantages of both platforms, reporting for the high-speed indium tin oxide electro-optic modulators based on silicon nitride waveguides. We demonstrate a bandwidth higher than 1 GHz, 9.3-μm-length active element, and an insertion loss of 5.7 dB for a 300 nm-thickness SiN waveguide platform. Simulation results of optimized device designs indicate that further improvements are possible, offering promising opportunities for silicon nitride photonic integrated circuit platform combined with indium oxide-based layers.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (18)
Evgeniy S. Lotkov
FMN Laboratory, Bauman Moscow State Technical University 1 , Moscow,
Aleksandr S. Baburin
FMN Laboratory, Bauman Moscow State Technical University 1 , Moscow,
Ali Sh. Amiraslanov
FMN Laboratory, Bauman Moscow State Technical University 1 , Moscow,
Eugeny D. Chubchev
Dukhov Automatics Research Institute (VNIIA) 2 , Moscow,
Alexander V. Dorofeenko
Dukhov Automatics Research Institute (VNIIA) 2 , Moscow,
Eugeny S. Andrianov
Dukhov Automatics Research Institute (VNIIA) 2 , Moscow,
Evgeny V. Sergeev
FMN Laboratory, Bauman Moscow State Technical University 1 , Moscow,
Kirill A. Buzaverov
FMN Laboratory, Bauman Moscow State Technical University 1 , Moscow,
Sergey S. Avdeev
FMN Laboratory, Bauman Moscow State Technical University 1 , Moscow,
Aleksey B. Kramarenko
FMN Laboratory, Bauman Moscow State Technical University 1 , Moscow,
Sergey V. Bukatin
FMN Laboratory, Bauman Moscow State Technical University 1 , Moscow,
Victor I. Polozov
Dukhov Automatics Research Institute (VNIIA) 2 , Moscow,
Olga S. Sorokina
FMN Laboratory, Bauman Moscow State Technical University 1 , Moscow,
Daria P. Kulikova
Dukhov Automatics Research Institute (VNIIA) 2 , Moscow,
Alexander V. Baryshev
Dukhov Automatics Research Institute (VNIIA) 2 , Moscow,
Ilya A. Ryzhikov
FMN Laboratory, Bauman Moscow State Technical University 1 , Moscow,
Yuri V. Panfilov
Ilya A. Rodionov