Shear horizontal mode surface acoustic wave resonator with ultra-high electromechanical coupling based on the X-cut LNOI acoustic platform

Tiancheng Luo; Qibin Zeng; Weifan Cai; Zhi Shiuh Lim; Shengwei Zeng; Samantha Faye Duran Solco; Zhen Ye; Chee Kiang Ivan Tan; Seeram Ramakrishna; Huajun Liu

doi:10.1063/5.0257796

Shear horizontal mode surface acoustic wave resonator with ultra-high electromechanical coupling based on the X-cut LNOI acoustic platform

T Tiancheng Luo (Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR) 1 , 2 Fusionopolis Way, Innovis #08–03, Singapore 138634,) Q Qibin Zeng W Weifan Cai (Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR) 1 , 2 Fusionopolis Way, Innovis #08–03, Singapore 138634,) Z Zhi Shiuh Lim (Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR) 1 , 2 Fusionopolis Way, Innovis #08–03, Singapore 138634,) S Shengwei Zeng (Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR) 3 , 2 Fusionopolis Way, Innovis #08-03, Singapore 138634,) S Samantha Faye Duran Solco (Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR) 1 , 2 Fusionopolis Way, Innovis #08–03, Singapore 138634,) Z Zhen Ye C Chee Kiang Ivan Tan (Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR) 1 , 2 Fusionopolis Way, Innovis #08–03, Singapore 138634,) S Seeram Ramakrishna (Department of Mechanical Engineering) H Huajun Liu

Abstract

Shear horizontal surface acoustic wave resonators (SH-SAWRs) based on lithium niobate thin films on insulator (LNOI) platforms exhibit high electromechanical coupling and hold significant potential for applications in devices operating at frequencies exceeding gigahertz (GHz). This work presents the SH-SAWR with a resonance frequency of 2 GHz and high effective electromechanical coupling coefficient (keff2) of up to 42%. Finite element analysis (FEA) and theoretical studies were combined to optimize the structural parameters of the device for higher keff2 and larger quality (Q) factor, with the measured results effectively validating the proposed designs. Compared to devices without grating reflectors (GRs), the Q factor can be increased by over twofold with floating GRs and by threefold with grounded GRs. Our results show the outstanding performance of SAW resonators based on LNOI, promising for ultrawideband wireless communications.

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Article Details

Journal Applied Physics Letters

Volume / Issue Vol. 126, Issue 19

Published May 12, 2025

DOI 10.1063/5.0257796

ISSN 0003-6951

Publisher American Institute of Physics

Journal Info

Applied Physics Letters

American Institute of Physics

ISSN: 0003-6951 Physical Sciences