Resonant-type multifunctional device using organic piezoelectrics for detecting differential pressure and acceleration

Abstract

In this study, a multifunctional device was developed using the organic piezoelectric material polyvinylidene fluoride (PVDF) to detect mechanical operations. This device utilizes a mechanism in which the resonance of the element structure is excited and detected using PVDF. This enabled the proposal of a device principle that can allow detection of various physical quantities, such as differential pressure and acceleration. The device can detect low pressures of up to 1.5 kPa with a sensitivity of −0.19 Hz/Pa. Additionally, it can measure acceleration with output linearity and cross-axis sensitivity. This device is advantageous because it can evaluate both pressure and acceleration using a common sensor structure and measurement methods, and it can be manufactured at room temperature using inexpensive materials. It holds potential for applications in the maintenance of various industrial machinery and monitoring of natural disasters.