Resolving carrier concentration of n-type AlN/GaN nanowires by scanning spreading resistance microscopy
Abstract
The AlN/GaN nanowire structures hold significant promising for enhancing the emission efficiency of ultraviolet light-emitting diodes. However, their electrical doping mechanisms remain insufficiently understood and require indepth investigation. Scanning spreading resistance microscopy (SSRM) was performed to systematically investigate the dopant distribution of Si-doped AlN/GaN nanowires (NWs) grown by plasma-assisted molecular beam epitaxy with Si cell temperatures ranging from 800 to 1000 °C. To ensure sample flatness at different NWs length, the NWs were embedded in a sol gel silica, and samples were subsequently polished in order to obtain a beveled profile. The nanowires doping trends were extracted from the SSRM data by deconvolution of silica and NWs responses. These studies demonstrated the axial uniformity and the radial uniformity of the NW core of Si.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (7)
Lanpeng Qiang
INSA Lyon, Ecole Centrale de Lyon, Université Claude Bernard Lyon 1, CPE Lyon, CNRS, INL, UMR5270, Bâtiment Irène Joliot Curie 1 , 1 rue Enrico Fermi, 69622 Villeurbanne Cedex,
David Albertini
CNRS, INSA Lyon, Ecole Centrale de Lyon, Université Claude Bernard Lyon 1 CPE Lyon, INL, UMR 5270 Villeurbanne 69622 France
Rémy Vermeersch
Université Grenoble Alpes, CEA, IRIG-PHELIQS, NPSC 3 , 17 Rue des Martyrs, 38000 Grenoble,
Julien Pernot
University Grenoble Alpes, Grenoble INP, Institut Néel, CNRS 4 , 38000 Grenoble,
Jean-Marie Bluet
INSA Lyon, Ecole Centrale de Lyon, Université Claude Bernard Lyon 1, CPE Lyon, CNRS, INL, UMR5270, Bâtiment Irène Joliot Curie 1 , 1 rue Enrico Fermi, 69622 Villeurbanne Cedex,
Bruno Daudin
Université Grenoble Alpes, CEA, IRIG-PHELIQS, NPSC 3 , 17 Rue des Martyrs, 38000 Grenoble,
Georges Brémond
INSA Lyon, Ecole Centrale de Lyon, Université Claude Bernard Lyon 1, CPE Lyon, CNRS, INL, UMR5270, Bâtiment Irène Joliot Curie 1 , 1 rue Enrico Fermi, 69622 Villeurbanne Cedex,