Quantum structure for efficient p-doping of AlGaN with Al content over 70%

Z Ziyue Qin (State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,) K Ke Jiang (International Collaborative Laboratory of 2D Materials for Optoelectronics Science and Technology of Ministry of Education, Institute of Microscale Optoelectronics) B Bingxiang Wang (State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,) C Chunyue Zhang (State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,) Z Zhiming Shi (State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,) K Kexi Liu (State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,) X Xianjun Wang B Boyu Hu S Shunpeng Lv (State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,) Y Yuping Jia (State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,) M Mingrui Liu (College of New Energy, State Key Laboratory of Heavy Oil Processing) S Shanli Zhang (State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,) X Xiaojuan Sun D Dabing Li

Abstract

The low p-doping efficiency of AlGaN due to its high activation energy limits the advancement of deep ultraviolet optoelectronics. The quantum engineering method has provided a new insight to address the challenge of acceptor activation in Al-rich AlGaN. As its unique valence band offset, the distribution of acceptor and band edge states in the barrier and well determines the acceptor activation efficiency. Here, we proposed a model for reducing the acceptor activation energy in quantum-structured p-AlGaN and provided experimental validation. By tuning the reactor pressure, we prepared periodic quantum-structured p-AlGaN with different cycles successfully. Compared to long-period quantum structures, short-period quantum structures introduce more band offsets, enhancing the wavefunction overlap between the acceptor states and the band edge states, thereby significantly promoting acceptor activation. Ultimately, we achieved an ultrathin quantum-structure p-AlGaN with an average Al content of ∼77% and a periodic thickness of 2.7 nm, reaching a record-low resistivity value of about 5.4 Ω·cm. Additionally, it is demonstrated that short-period quantum structures can facilitate hole injection in deep ultraviolet light-emitting diodes, effectively improving their external quantum efficiency. This study offers an effective p-doping strategy for Al-rich AlGaN and paves the way for applications of deep ultraviolet optoelectronics.

Article Details

Volume / Issue Vol. 128, Issue 2
Published January 12, 2026
ISSN 0003-6951
Publisher American Institute of Physics

Journal Info

Applied Physics Letters

American Institute of Physics

ISSN: 0003-6951 Physical Sciences

Authors (14)

Z

Ziyue Qin

State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,

K

Ke Jiang

International Collaborative Laboratory of 2D Materials for Optoelectronics Science and Technology of Ministry of Education, Institute of Microscale Optoelectronics

B

Bingxiang Wang

State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,

C

Chunyue Zhang

State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,

Z

Zhiming Shi

State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,

K

Kexi Liu

State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,

X

Xianjun Wang

B

Boyu Hu

S

Shunpeng Lv

State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,

Y

Yuping Jia

State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,

M

Mingrui Liu

College of New Energy, State Key Laboratory of Heavy Oil Processing

S

Shanli Zhang

State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 1 , Changchun 130033,

X

Xiaojuan Sun

D

Dabing Li