Preparation and characterization of zirconium-doped indium oxide conducting films with high infrared transparency
Abstract
This work reports the zirconium-doped indium oxide (IZRO) transparent conductive thin films on infrared optical quartz glass (JGS-3) substrates via room-temperature RF magnetron sputtering. The effects of annealing temperature and oxygen flow ratio on electrical and optical properties were systematically investigated. The optimized IZRO film with 3 sccm oxygen flow and 700 °C annealing temperatures exhibited an average optical transmittance of 91.5% in the wavelength of 1300–1550 nm and a minimum resistivity of 1.37 × 10−3 Ω·cm with a carrier concentration of 2.46 × 1020 cm−3. The results of x-ray photoelectron spectroscopy revealed that the enhanced electrical conductivity can be attributed to the activation of Zr doping through high-temperature annealing. Meanwhile, the structural and morphological properties of the obtained films were investigated in detail. The IZRO films have potential in the field of short-wave infrared (SWIR) optoelectronic devices due to their SWIR transparent conductive properties.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (12)
Hanpeng Liu
School of Integrated Circuit Science and Engineering, State Key Laboratory of Crystal Materials, Engineering Research Center of Optoelectronic Devices and Communication Technology, Tianjin University of Technology 1 , Tianjin 300384,
Liang Wang
Lin'an He
School of Integrated Circuit Science and Engineering, State Key Laboratory of Crystal Materials, Engineering Research Center of Optoelectronic Devices and Communication Technology, Tianjin University of Technology 1 , Tianjin 300384,
Wei Mi
Di Wang
Liwei Zhou
Yan Zhu
Juan Wang
Department of Chemical and Biomolecular Engineering
Xingcheng Zhang
Institute of Microelectronics of the Chinese Academy of Science 2 , Beijing 100029,
Rongrong Chen
Kai Niu
Tianjin Infraytech Co., LTD 3 , Tianjin 300384,
Jinshi Zhao
State Key Laboratory of Crystal Materials School of Materials Science and Engineering Tianjin University of Technology Tianjin 300384 China