Performance enhancement of GaN-based VCSELs by composition-graded structures

Y Ya-Chao Wang (Department of Microelectronics and Integrated Circuits, Xiamen University 1 , Xiamen 361005,) Y Yu-Bing Xia (Department of Microelectronics and Integrated Circuits, Xiamen University 1 , Xiamen 361005,) A Ai-Qin Tian (Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences 2 , Suzhou 215123,) J Jian-Ping Liu (Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences 2 , Suzhou 215123,) X Xiao-Bing Geng (Department of Microelectronics and Integrated Circuits, Xiamen University 1 , Xiamen 361005,) L Lei-Ying Ying (Department of Microelectronics and Integrated Circuits, Xiamen University 1 , Xiamen 361005,) Y Yang Mei (Zhejiang Key Laboratory of Biology and Ecological Regulation of Crop Pathogens and Insects, Institute of Insect Sciences, Zhejiang University) B Bao-Ping Zhang (Department of Microelectronics and Integrated Circuits, Xiamen University 1 , Xiamen 361005,)

Abstract

The carrier-injection efficiency and confinement within the active region play a crucial role in determining the threshold and slope efficiency of GaN-based vertical-cavity surface-emitting lasers (VCSELs). In this study, two types of composition-graded epitaxial structures were proposed: a composition-graded last quantum barrier (LQB) and a composition-graded electron blocking layer (EBL). GaN-based optically pumped VCSELs incorporating these structures exhibit significant improvements over conventional composition-uniform designs, with threshold reductions of 71.1% and 53.2%, respectively. Band structure analysis reveals that these performance improvements are attributed to enhanced electron injection efficiency and improved hole confinement within the active region as well. Furthermore, pulsed lasing operation in electrically injected VCSELs was demonstrated by employing the composition-graded LQB structure. This study systematically validated the effectiveness of the composition-graded LQB and EBL structures in improving GaN-based VCSEL performance from experimental perspectives. These findings provide valuable insights for the development of GaN-based VCSELs.

Article Details

Volume / Issue Vol. 127, Issue 17
Published October 23, 2025
ISSN 0003-6951
Publisher American Institute of Physics

Journal Info

Applied Physics Letters

American Institute of Physics

ISSN: 0003-6951 Physical Sciences

Authors (8)

Y

Ya-Chao Wang

Department of Microelectronics and Integrated Circuits, Xiamen University 1 , Xiamen 361005,

Y

Yu-Bing Xia

Department of Microelectronics and Integrated Circuits, Xiamen University 1 , Xiamen 361005,

A

Ai-Qin Tian

Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences 2 , Suzhou 215123,

J

Jian-Ping Liu

Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences 2 , Suzhou 215123,

X

Xiao-Bing Geng

Department of Microelectronics and Integrated Circuits, Xiamen University 1 , Xiamen 361005,

L

Lei-Ying Ying

Department of Microelectronics and Integrated Circuits, Xiamen University 1 , Xiamen 361005,

Y

Yang Mei

Zhejiang Key Laboratory of Biology and Ecological Regulation of Crop Pathogens and Insects, Institute of Insect Sciences, Zhejiang University

B

Bao-Ping Zhang

Department of Microelectronics and Integrated Circuits, Xiamen University 1 , Xiamen 361005,