On-chip integration and strong coupling between ScAlN thin-film surface acoustic wave resonators and superconducting qubits
Abstract
Thin-film surface acoustic wave (SAW) devices exhibit high quality factors and are promising candidates for quantum transducers, with significant potential for on-chip integration with high-coherence superconducting quantum circuits and optical resonators. However, the experimental demonstration of strong coupling between thin-film SAWs and superconducting qubits in the quantum regime remains a considerable challenge. In this study, we demonstrate strong coupling between a ScAlN thin-film SAW resonator and a high-coherence qubit on the same substrate, where the enhanced qubit coherence was achieved through selective ScAlN etching. Distinct multimode anticrossings are observed in both the qubit and SAW resonator frequency spectra, with extracted coupling strengths closely matching theoretical predictions. Additionally, we investigate qubit decay and the dissipation properties of the SAW resonator in the SAW-qubit hybrid system. Our results confirm the feasibility of integrating thin-film SAW devices with high-coherence superconducting circuits and offer valuable insights for optimizing the performance of such hybrid systems.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (9)
Junfeng Chen
Xiaoliang He
State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 1 , Shanghai 200050,
Wanpeng Gao
State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 1 , Shanghai 200050,
Xiaoyu Liu
Optogenetics & Synthetic Biology Interdisciplinary Research Center, Shanghai Frontiers Science Center of Optogenetic Techniques for Cell Metabolism, School of Pharmacy, East China University of Science and Technology, 130 Mei Long Road, Shanghai 200237, China
Zhengqi Niu
State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Science 3 , Shanghai 200050,
Kuang Liu
State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 1 , Shanghai 200050,
Wei Peng
Andlinger Center for Energy and the Environment, Princeton University
Zhen Wang
Zhi-Rong Lin
State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Science 3 , Shanghai 200050,