On-chip electrically tunable silicon whispering gallery mode resonator for THz integrated circuits
Abstract
This study demonstrates an on-chip electrically tunable whispering gallery mode resonator (WGMR) operating in the terahertz (THz) band, fabricated on a silicon platform. The device consists of a micro-ring resonator with integrated platinum electrodes for voltage application. By leveraging the thermo-optic effect of silicon, the resonant frequency of the WGMR is dynamically shifted via Joule heating induced by an applied voltage, enabling continuous electrical tuning of the resonance. Experimental results show a continuous frequency tunability of 0.40 GHz/W, with the resonator exhibiting a measured quality factor (Q-factor) of 199 around 390 GHz. This work provides a compact, integrable, and efficient solution for active resonance control in THz integrated circuits, with promising applications in reconfigurable filters, modulators, sensors, and next-generation wireless communication systems.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (20)
Huilin Zhang
Xuecou Tu
Ning Zhao
Institute of Photochemistry and Photofunctional Materials
ShuYu Zhou
Dingxuan Gu
Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University 1 , Nanjing, Jiangsu 210023,
Zeyu Xu
State Key Laboratory of Materials Low-Carbon Recycling
Yunjie Rui
Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University 1 , Nanjing, Jiangsu 210023,
Zhanzhang Mai
Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University 1 , Nanjing, Jiangsu 210023,
Bingnan Yan
Ziyao Ye
Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University 1 , Nanjing, Jiangsu 210023,
Heng Tang
Junyi Wu
Shuang Ding
Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University 1 , Nanjing, Jiangsu 210023,
Jun Zhou
Qingyuan Zhao
Labao Zhang
Xiaoqing Jia
Lin Kang
Jian Chen
Peiheng Wu