On-chip compact radio frequency metal self-rolled-up nanomembrane resonator

Abstract

The miniaturization of the on-chip radio frequency (RF) resonators is critical for the development of the next-generation compact mobile equipment. The commonly used RF inductor–capacitor (L-C) resonators usually occupy a large chip area due to the low electromagnetic energy of their planar structure design. In this paper, we demonstrated a self-rolled-up nanomembrane (SRuM) platform utilizing metal stress to realize the rolling process, which enables the fabrication of on-chip L-C microtube resonators with a compact size. Compared to the RF silicon nitride (SiNx) SRuM L-C resonators, the metal SRuM L-C resonators show 47% smaller inner diameter and on-chip footprint. The design principle to achieve optimized electrical performance is also discussed in detail.