Molecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures
E
Eun Koo Kim
J
Jong Woo Hong
W
Woong Sun Lim
J
Ja Yeon Kim
K
Kyung Lim Kim
J
Jong Soon Park
Y
Yun Jae Park
C
Chan Ho Kim
H
Hyeong Joon Eoh
J
Jun Won Jeong
S
Sung Hyun Kim
Y
Young Woo Jeon
D
Dong Woo Kim
G
Geun Young Yeom
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 16, Issue 1
Published
February 03, 2026
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (14)
E
Eun Koo Kim
J
Jong Woo Hong
W
Woong Sun Lim
J
Ja Yeon Kim
K
Kyung Lim Kim
J
Jong Soon Park
Y
Yun Jae Park
C
Chan Ho Kim
H
Hyeong Joon Eoh
J
Jun Won Jeong
S
Sung Hyun Kim
Y
Young Woo Jeon
D
Dong Woo Kim
G
Geun Young Yeom
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