Kim, E. K., Hong, J. W., Lim, W. S., Kim, J. Y., Kim, K. L., Park, J. S., Park, Y. J., Kim, C. H., Eoh, H. J., Jeong, J. W., Kim, S. H., Jeon, Y. W., Kim, D. W., Yeom, G. Y. (2026). Molecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures. Scientific Reports. https://doi.org/10.1038/s41598-026-38333-w