Eun Koo Kim, Jong Woo Hong, Woong Sun Lim, Ja Yeon Kim, Kyung Lim Kim, Jong Soon Park, Yun Jae Park, Chan Ho Kim, Hyeong Joon Eoh, Jun Won Jeong, Sung Hyun Kim, Young Woo Jeon, Dong Woo Kim, Geun Young Yeom. "Molecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures." Scientific Reports (2026). https://doi.org/10.1038/s41598-026-38333-w