Molecular beam epitaxy of ferroelectric ScAlN on <b> <i>β</i> </b> -Ga2O3 substrates
Abstract
We demonstrate the epitaxial integration of ferroelectric ScAlN thin films on β-Ga2O3 substrates via molecular beam epitaxy without any buffer layers, enabled by surface pre-nitridation. The resulting ScAlN films exhibit robust ferroelectricity, characterized by large apparent remanent polarization (&gt;150 μC/cm2), good retention (&gt;105 s), and minimal fatigue observed up to 105 switching cycles. High-resolution x-ray photoelectron spectroscopy reveals a type-II band alignment at the ScAlN/β-Ga2O3 heterointerface, with extracted valence and conduction band offsets of 0.5 and 1.0 eV, respectively. These results establish an oxide/nitride heterostructure platform that combines the intrinsic ferroelectricity of ScAlN with the ultra-wide bandgap and photosensitive properties of β-Ga2O3, offering compelling opportunities for next-generation nonvolatile memory, photodetection, and optoelectronic synaptic devices.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (18)
Yuzhi Deng
College of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University 1 , Beijing 100096,
Rui Wang
Haotian Ye
Xiaoyang Yin
Ran Feng
Department of Geosciences
Bingxuan An
Baocong Huang
College of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University 1 , Beijing 100096,
Xiantong Zheng
College of Instrument Science and Opto‐electronics Engineering Beijing Information Science and Technology University Beijing 100096 China
Tao Wang
Wenxiang Mu
State Key Laboratory of Crystal Materials, Institute of Novel Semiconductors, Institute of Crystal Materials, Shandong University 5 , Jinan, Shandong 250100,
Ding Wang
Fang Liu
Yi Tong
Yulin Feng
College of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University 1 , Beijing 100096,
Yuan Liu
Bo Shen
Department of Chemistry
Ping Wang
Xinqiang Wang
Department of Epidemiology and Biostatistics, School of Public Health, Tongji Medical College, Huazhong University of Science and Technology