Measurements of in-plane thermophysical properties on nanoscale-thick films by lock-in thermography

Abstract

We demonstrate a versatile technique for measuring the in-plane thermal conductivity, in-plane thermal diffusivity, and volumetric heat capacity of nanoscale-thick films by means of lock-in thermography. The technique relies on the thermal analyses of imaged lock-in temperature distribution over the surface of films generated by an on-chip line heater. This enables simultaneous estimation of the properties for a free-standing membrane or multilayered thin films deposited on the membrane. We validate the usability of this technique by determining the thermophysical properties of Ni films with different nanoscale thicknesses. This technique also enables measurements under an external magnetic field, facilitating investigation of magneto-thermal transport properties. Thus, the proposed approach will be useful for exploring nanoscale thermal transport properties in thin films and thermal management systems.