Low-noise quantum dots in ultra-shallow Ge/SiGe heterostructures for prototyping hybrid semiconducting–superconducting devices

M Maksim Borovkov (ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,) Y Yona Schell D Dina Sokolova (ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,) K Kevin Roux P Paul Falthansl-Scheinecker (ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,) G Giorgio Fabris (ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,) D Devashish Shah (ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,) J Jaime Saez-Mollejo R Rodolfo Previdi (ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,) I Inas Taha A Aziz Genç (Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST, Campus UAB, Bellaterra, 08193, Barcelona, Catalonia Spain) J Jordi Arbiol (Catalan Institute of Nanoscience and Nanotechnology − ICN2 (CSIC and BIST), Campus UAB, Bellaterra, Barcelona, Catalonia 08193, Spain) S Stefano Calcaterra A Afonso De Cerdeira Oliveira (L-NESS, Physics Department, Politecnico di Milano 4 , via Anzani 42, 22100 Como,) D Daniel Chrastina G Giovanni Isella A Anton Bubis (ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,) G Georgios Katsaros

Abstract

Planar germanium is currently the only semiconducting platform where high-coherence spin qubits and proximity-induced superconductivity have each been demonstrated. Recent research into spin qubits in Ge/SiGe heterostructures has focused on increasing the thickness of the SiGe capping layer, reporting improvements in the electrostatic noise levels. Meanwhile, heterostructures with thinner capping layers remain rather unexplored, despite the potential advantages for proximity-induced superconductivity. Here, we study a Ge/SiGe heterostructure with a thin SiGe cap d≈4 nm and investigate its viability to host low-noise quantum dots. To keep the thermal budget compatible with superconducting layers, low-temperature oxide deposition processes were developed and implemented for the gate dielectrics. The charge noise level of the fabricated devices is estimated to be 1.8 ± 1.0 μeV/Hz, comparable to devices fabricated on shallow heterostructures (d∼20 nm) with high-temperature deposited oxides. Low charge noise levels, together with the straightforward integration of superconductors, make this heterostructure an attractive platform for prototyping hybrid semiconducting–superconducting devices.

Article Details

Volume / Issue Vol. 129, Issue 3
Published July 20, 2026
ISSN 0003-6951
Publisher American Institute of Physics

Journal Info

Applied Physics Letters

American Institute of Physics

ISSN: 0003-6951 Physical Sciences

Authors (18)

M

Maksim Borovkov

ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,

Y

Yona Schell

D

Dina Sokolova

ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,

K

Kevin Roux

P

Paul Falthansl-Scheinecker

ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,

G

Giorgio Fabris

ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,

D

Devashish Shah

ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,

J

Jaime Saez-Mollejo

R

Rodolfo Previdi

ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,

I

Inas Taha

A

Aziz Genç

Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST, Campus UAB, Bellaterra, 08193, Barcelona, Catalonia Spain

J

Jordi Arbiol

Catalan Institute of Nanoscience and Nanotechnology − ICN2 (CSIC and BIST), Campus UAB, Bellaterra, Barcelona, Catalonia 08193, Spain

S

Stefano Calcaterra

A

Afonso De Cerdeira Oliveira

L-NESS, Physics Department, Politecnico di Milano 4 , via Anzani 42, 22100 Como,

D

Daniel Chrastina

G

Giovanni Isella

A

Anton Bubis

ISTA, Institute of Science and Technology Austria 1 , Am Campus 1, 3400 Klosterneuburg,

G

Georgios Katsaros