Laser-based FinFET hot-carrier degradation resolved in time-domain

R R. Ascázubi (Intel Corp. , Hillsboro, Oregon 97124,) B B. Ajdari (Intel Corp. , Hillsboro, Oregon 97124,)

Abstract

Hot-carrier degradation in contemporary FinFET transistors by means of ultrafast infrared laser pulses enable the study of the evolution of excited states leading to device degradation. Here, we present results from a time-resolved optical setup where additive populations of hot-carriers are photo-injected. We report the experimental observation of damage-inducing excited states with a lifetime of 170 ± 40 fs.

Article Details

Volume / Issue Vol. 126, Issue 9
Published March 01, 2025
ISSN 0003-6951
Publisher American Institute of Physics

Journal Info

Applied Physics Letters

American Institute of Physics

ISSN: 0003-6951 Physical Sciences

Authors (2)

R

R. Ascázubi

Intel Corp. , Hillsboro, Oregon 97124,

B

B. Ajdari

Intel Corp. , Hillsboro, Oregon 97124,