Impact of process control on electrical breakdown characteristics of quasi-one-dimensional ZrTe3 interconnects
Abstract
We have clarified the impact of process control on the electrical breakdown characteristics of quasi-one-dimensional ZrTe3 interconnects. The regulation of contact resistance by process control enables significant variance of both breakdown current density and structural characteristics. The ZrTe3 interconnects fabricated with a conventional photolithography process show high contact resistance, low breakdown current density, and electromigration-dominated structural breakdown characteristics. By supplementing a reactive ion etching step to reduce contact resistance, the breakdown current density and structural characteristics change significantly. Further contact resistance reduction by adopting a transfer process promotes significantly increased breakdown current density and distinct thermal decomposition-dominated structural characteristics. The current investigation implies that the process control is crucial for quasi-one-dimensional ZrTe3 interconnects.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (10)
Xinyue Xu
Xiaokun Wen
State Key Laboratory of Material Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology 1 , Wuhan 430074,
Boyuan Di
State Key Laboratory of Material Processing and Die and Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology 1 , Wuhan 430074,
Wenyu Lei
State Key Laboratory of Material Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology 1 , Wuhan 430074,
Wenchao Kong
State Key Laboratory of Material Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology 1 , Wuhan 430074,
Yuxiang Wang
Key Laboratory of Photochemical Conversion and Optoelectronic Materials & CAS-HKU Joint Laboratory on New Materials
Shiwan Zou
State Key Laboratory of Material Processing and Die and Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology 1 , Wuhan 430074,
Liqiang Chen
State Key Laboratory of Material Processing and Die and Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology 1 , Wuhan 430074,
Haixin Chang
Wenfeng Zhang