Hydrogenation-induced gigantic resistance decrease of palladium films deposited by high pressure magnetron sputtering

Abstract

We demonstrate a pronounced decrease in the electrical resistance of highly disordered palladium (Pd) films deposited under a high working Ar pressure using a compact film coating system. The resulting resistance change ratio of up to 1/335 is predominant among those reported previously. Film characterization suggests two primary mechanisms responsible for this significant resistance reduction: atomic force microscopy observation indicates improved electrical contacts among Pd grains, and X-ray diffraction measurement demonstrates hydrogenation-induced crystallization of Pd. These findings offer a simple scheme to enhance hydrogen sensor performance and can contribute to a more comprehensive understanding of the hydrogenation process in Pd.