High-performance Love-mode phononic crystal resonators on LiNbO3/SiC achieving an FoM of 352
Abstract
This Letter reports a high-performance Love-mode phononic crystal resonator (PnCR) on a LiNbO3/SiC substrate, realized by substituting conventional Bragg reflectors with phononic crystals (PnCs). This approach significantly enhances energy confinement, achieving a record figure of merit (FoM) of 352.4, currently the highest reported in thin-film surface acoustic wave (TF-SAW) devices, along with an electromechanical coupling coefficient (kt2) of 27.3% and a maximum Bode-Q (Qmax) of 1291 at 2.18 GHz. Additionally, a periodic dependence of Qmax on the spacing between PnCs and the interdigital transducers provides a valuable design guideline. These results underscore the transformative potential of PnCRs in advancing next-generation microwave acoustic devices toward higher performance and greater miniaturization.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (7)
Yi-Han He
National Laboratory of Solid-State Microstructures and Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,
Zhen-Hui Qin
National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,
Hua-Yang Chen
National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,
Nan-Xin Yu
National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,
Zhi-wen Wang
Si-Yuan Yu
National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,
Yan-feng Chen