GHz Love-mode TF-SAW phononic crystals based on LiNbO3-on-SiC substrate

Y Yi-Han He (National Laboratory of Solid-State Microstructures and Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,) Z Zhen-Hui Qin (National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,) H Hua-Yang Chen (National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,) N Nan-Xin Yu (National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,) Z Zhi-wen Wang S Si-Yuan Yu (National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,) Y Yan-feng Chen

Abstract

We demonstrate thin-film surface acoustic wave (TF-SAW) phononic crystals (PnCs) by etching a square lattice array of micropores into a 300 nm LiNbO3-on-SiC substrate, harnessing the remarkable properties of Love modes. Our design enables tailorable bandgaps from 2.026 to 2.347 GHz (approximately 15% bandwidth) along Γ-X, extending up to 3.167 GHz along Γ-M, with experimental measurements confirming Love mode attenuation up to 40 dB. By precisely engineering the micropore geometry and layer configuration, we effectively tune both the position and width of the bandgaps. These TF-SAW PnCs offer powerful acoustic wave manipulation capabilities and scalability, opening horizons for high-throughput communication, sensing, microfluidics, and emerging quantum acoustics technologies.

Article Details

Volume / Issue Vol. 126, Issue 16
Published April 21, 2025
ISSN 0003-6951
Publisher American Institute of Physics

Journal Info

Applied Physics Letters

American Institute of Physics

ISSN: 0003-6951 Physical Sciences

Authors (7)

Y

Yi-Han He

National Laboratory of Solid-State Microstructures and Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,

Z

Zhen-Hui Qin

National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,

H

Hua-Yang Chen

National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,

N

Nan-Xin Yu

National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,

Z

Zhi-wen Wang

S

Si-Yuan Yu

National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,

Y

Yan-feng Chen