GHz Love-mode TF-SAW phononic crystals based on LiNbO3-on-SiC substrate
Abstract
We demonstrate thin-film surface acoustic wave (TF-SAW) phononic crystals (PnCs) by etching a square lattice array of micropores into a 300 nm LiNbO3-on-SiC substrate, harnessing the remarkable properties of Love modes. Our design enables tailorable bandgaps from 2.026 to 2.347 GHz (approximately 15% bandwidth) along Γ-X, extending up to 3.167 GHz along Γ-M, with experimental measurements confirming Love mode attenuation up to 40 dB. By precisely engineering the micropore geometry and layer configuration, we effectively tune both the position and width of the bandgaps. These TF-SAW PnCs offer powerful acoustic wave manipulation capabilities and scalability, opening horizons for high-throughput communication, sensing, microfluidics, and emerging quantum acoustics technologies.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (7)
Yi-Han He
National Laboratory of Solid-State Microstructures and Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,
Zhen-Hui Qin
National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,
Hua-Yang Chen
National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,
Nan-Xin Yu
National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,
Zhi-wen Wang
Si-Yuan Yu
National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, Nanjing University 1 , Nanjing 210093,
Yan-feng Chen