Enhancing the fatigue performance of laminated hafnium zirconium oxide ferroelectric thin films via reducing interfacial charge density
Abstract
Laminated HfO2-based ferroelectric thin films show great promise for applications in high-density ferroelectric field-effect transistor memories, nanoelectromechanical system resonators, and energy storage devices. However, the polarization fatigue performance of widely investigated Hf0.5Zr0.5O2 (HZO)/Al2O3/HZO laminated films remains poor. In this work, we propose a novel laminated ferroelectric film, HZO/HfN/HZO, to enhance the fatigue performance. Compared with HZO/Al2O3/HZO thin films, the HZO/HfN/HZO films demonstrate significantly enhanced fatigue resistance, enduring up to 1 × 108 cycles at a measurement frequency of 100 kHz and exhibiting slower polarization degradation. This improvement is revealed to stem from a reduced interface trap charge density. Moreover, the lower trap density is attributed to the smaller electric field across the HfN layer that suppresses its degradation and a bandgap comparable to HZO that minimizes carrier energy release at the HfN/HZO interface. This work presents a key step for developing highly reliable laminated HfO2 ferroelectric films and devices.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (8)
Kejun Tan
Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, School of Materials Science and Engineering, Xiangtan University 1 , Xiangtan 411105,
Tianqi Tang
Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, School of Materials Science and Engineering, Xiangtan University 1 , Xiangtan 411105,
Binjian Zeng
Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, School of Materials Science and Engineering, Xiangtan University 1 , Xiangtan 411105,
Shuaizhi Zheng
Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, School of Materials Science and Engineering, Xiangtan University 1 , Xiangtan 411105,
Qiong Yang
State Key Laboratory of Vaccines for Infectious Diseases, Xiang-An Biomedicine Laboratory, Department of Laboratory Medicine, School of Public Health, Xiamen University
Qiangxiang Peng
Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, School of Materials Science and Engineering, Xiangtan University 1 , Xiangtan 411105,
Yichun Zhou
Shaanxi Key Laboratory of High-Orbits-Electron Materials and Protection Technology for Aerospace, School of Advanced Materials and Nanotechnology, Xidian University 3 , Xi'an 710126,
Min Liao