Direct measurement of the electron wind force in cobalt nanowires
Abstract
Copper back-end-of-line interconnects have been the industry standard for decades, but copper's susceptibility to electromigration failure has motivated a search for alternatives. While cobalt's resistivity is higher than copper's in bulk form, it scales more slowly with decreasing interconnect size, making cobalt a promising alternative for highly scaled interconnects. To better understand the electromigration behavior of cobalt, we map both temperature- and the current-induced strain in cobalt nanowires using a scanning transmission electron microscope equipped with an electron energy loss spectrometer. We consistently see cobalt move away from the anode, and we find cobalt's effective ionic charge Z*=+2±1 near 300 °C. This result will inform the design of highly scaled cobalt interconnects.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (6)
Brian Zutter
Department of Physics & Astronomy and California NanoSystems Institute, University of California 1 , Los Angeles, California 90095,
Matthew Mecklenburg
Core Center of Excellence in Nano Imaging, University of Southern California 2 , Los Angeles, California 90089,
Yueyun Chen
Department of Physics & Astronomy and California NanoSystems Institute, University of California 1 , Los Angeles, California 90095,
Ho Leung Chan
Department of Physics & Astronomy and California NanoSystems Institute, University of California 1 , Los Angeles, California 90095,
Jared J. Lodico
Department of Physics & Astronomy and California NanoSystems Institute, University of California 1 , Los Angeles, California 90095,
B. C. Regan
Department of Physics & Astronomy and California NanoSystems Institute, University of California 1 , Los Angeles, California 90095,