Deep-subwavelength (∼λ/160 000) terahertz sensing with an ultrathin flexible metasurface

V Vanlal Rinfela (Ultrafast Terahertz Photonics Laboratory (UTPL), Department of Physics, Indian Institute of Technology Hyderabad 1 , Kandi, Sangareddy, Telangana 502284,) B Bhawana Andola (Ultrafast Terahertz Photonics Laboratory (UTPL), Department of Physics, Indian Institute of Technology Hyderabad 1 , Kandi, Sangareddy, Telangana 502284,) R Rajour Tanyi Ako (Functional Materials and Microsystems Research Group and the Micro Nano Research Facility, ARC Centre of Excellence for Transformative Meta-Optical Systems, RMIT University 3 , Melbourne, VIC 3000,) N Naveen Periketi B Bhaswati Biswas (Department of Material Science and Metallurgical Engineering (MSME), Indian Institute of Technology Hyderabad 5 , Kandi, Sangareddy, Telangana 502284,) M Madhu Bhaskaran (Functional Materials and Microsystems Research Group and the Micro Nano Research Facility, ARC Centre of Excellence for Transformative Meta-Optical Systems, RMIT University 3 , Melbourne, VIC 3000,) C Chandrasekhar Murapaka (Department of Material Science and Metallurgical Engineering (MSME), Indian Institute of Technology Hyderabad 5 , Kandi, Sangareddy, Telangana 502284,) A Anil Kumar Chaudhary (DIA-CoE (ARCHEM), School of Physics, University of Hyderabad 4 , Prof. CR Rao Road, Hyderabad 500046,) S Sharath Sriram (Functional Materials and Microsystems Research Group and the Micro Nano Research Facility, ARC Centre of Excellence for Transformative Meta-Optical Systems, RMIT University 3 , Melbourne, VIC 3000,) P Prem Pal (MEMS & Micro/Nano Systems Laboratory, Department of Physics, Indian Institute of Technology Hyderabad 2 , Kandi, Sangareddy, Telangana 502284,) Y Yogesh Kumar Srivastava (Ultrafast Terahertz Photonics Laboratory (UTPL), Department of Physics, Indian Institute of Technology Hyderabad 1 , Kandi, Sangareddy, Telangana 502284,)

Abstract

Terahertz (THz) sensing of deep-subwavelength dielectric films remains a formidable challenge due to the stark mismatch between the long wavelengths of terahertz radiation and the nanoscale thicknesses of the analytes. Although high-quality-factor (Q) metallic resonators are widely used to enhance light–matter interaction, their performance is fundamentally constrained by intrinsic radiative and non-radiative losses. Overcoming these limitations is crucial to achieving strong local-field enhancement and detecting ultrathin films. Here, we present a planar metasurface sensor fabricated on an ultra-low-index, flexible cyclic olefin copolymer substrate, engineered to achieve strong electromagnetic field confinement within an effective mode volume of 7.52 μm3 [approximately 10−7(λ/n)3] at 0.94 THz. This design achieves a high Q/Veff ratio of ∼1.463, effectively overcoming the limitations of conventional high-Q resonance approaches. Using conventional THz time-domain spectroscopy, we experimentally detect an ultrathin 2 nm germanium (Ge) overlayer equivalent to λ/160 000, where λ is the resonant wavelength. To the best of our knowledge, this demonstrates the thinnest analyte layer ever detected at terahertz frequencies, achieved through exceptional sensitivity of micrometer-scale resonators that obviate the need for complex nanoscale fabrication. The sensor exhibits a refractive index sensitivity of 15.54 GHz/RIU for a 40 nm analyte layer, establishing a new paradigm for deep-subwavelength THz sensing and paving the way for compact, flexible, and high-performance THz photonic platforms.

Article Details

Volume / Issue Vol. 128, Issue 8
Published February 23, 2026
ISSN 0003-6951
Publisher American Institute of Physics

Journal Info

Applied Physics Letters

American Institute of Physics

ISSN: 0003-6951 Physical Sciences

Authors (11)

V

Vanlal Rinfela

Ultrafast Terahertz Photonics Laboratory (UTPL), Department of Physics, Indian Institute of Technology Hyderabad 1 , Kandi, Sangareddy, Telangana 502284,

B

Bhawana Andola

Ultrafast Terahertz Photonics Laboratory (UTPL), Department of Physics, Indian Institute of Technology Hyderabad 1 , Kandi, Sangareddy, Telangana 502284,

R

Rajour Tanyi Ako

Functional Materials and Microsystems Research Group and the Micro Nano Research Facility, ARC Centre of Excellence for Transformative Meta-Optical Systems, RMIT University 3 , Melbourne, VIC 3000,

N

Naveen Periketi

B

Bhaswati Biswas

Department of Material Science and Metallurgical Engineering (MSME), Indian Institute of Technology Hyderabad 5 , Kandi, Sangareddy, Telangana 502284,

M

Madhu Bhaskaran

Functional Materials and Microsystems Research Group and the Micro Nano Research Facility, ARC Centre of Excellence for Transformative Meta-Optical Systems, RMIT University 3 , Melbourne, VIC 3000,

C

Chandrasekhar Murapaka

Department of Material Science and Metallurgical Engineering (MSME), Indian Institute of Technology Hyderabad 5 , Kandi, Sangareddy, Telangana 502284,

A

Anil Kumar Chaudhary

DIA-CoE (ARCHEM), School of Physics, University of Hyderabad 4 , Prof. CR Rao Road, Hyderabad 500046,

S

Sharath Sriram

Functional Materials and Microsystems Research Group and the Micro Nano Research Facility, ARC Centre of Excellence for Transformative Meta-Optical Systems, RMIT University 3 , Melbourne, VIC 3000,

P

Prem Pal

MEMS & Micro/Nano Systems Laboratory, Department of Physics, Indian Institute of Technology Hyderabad 2 , Kandi, Sangareddy, Telangana 502284,

Y

Yogesh Kumar Srivastava

Ultrafast Terahertz Photonics Laboratory (UTPL), Department of Physics, Indian Institute of Technology Hyderabad 1 , Kandi, Sangareddy, Telangana 502284,