CMOS programmable metachip for terahertz multifunctional sensing

Abstract

A CMOS-based programmable terahertz (THz) metachip for multifunctional sensing is proposed and experimentally demonstrated in this work. Fabricated using a standard 55-nm CMOS process, the metachip is composed of periodically arranged meta-atoms with on-chip circuits, enabling multi-frequency amplitude modulation at 360, 413, and 493 GHz with a peak modulation index exceeding 20 dB. Proof-of-concept experiments are carried out for sensing object motion and fingerprint objects at distinct operational frequencies using the proposed metachip array. This work realizes multifunctional sensing, which will promote the development of multifunctional and highly integrated terahertz on-chip sensing systems.