Anticathode effect on multimodal azimuthal oscillations in electron beam generated E×B plasma
Abstract
Electron beam (e-beam) generated plasmas with applied crossed electric and magnetic (E×B) fields are promising for low-damage (gentle) material processing. However, these plasmas can be subject to the formation of plasma non-uniformities propagating in the E×B direction. These rotating plasma structures (or “spokes”) enhance the transport of charged species across the magnetic field, which can harm the gentle processing capability of the plasma. In this work, we investigate the role of electrostatically active boundaries on the spoke formation by incorporating a variable bias conducting boundary (known as an anticathode) placed on the axially opposite side of the cathode. Our findings indicate azimuthal mode suppression occurs when the anticathode is electron collecting. Furthermore, we show selective azimuthal mode suppression by biasing the anticathode to an intermediate potential between the cathode and anode potentials. These findings suggest a link between the axial electron confinement in the e-beam generated plasma and azimuthally propagating plasma structure formation.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (2)
Nirbhav Singh Chopra
Princeton Plasma Physics Laboratory, Princeton University 1 , Princeton, New Jersey 08543,
Yevgeny Raitses
Princeton Plasma Physics Laboratory, Princeton University 1 , Princeton, New Jersey 08543,