An electrothermally actuated high-power MOEMS optical switch with a state-latching mechanism

Abstract

Optical switches serve as a critical core component in laser ignition systems (LISs), responsible for controlling the ON/OFF state of the optical path. Its performance directly impacts the operational effectiveness of the weapon system. To prevent long-term heat accumulation and achieve low power consumption, this paper proposes a novel Micro-Opto-Electro-Mechanical System optical switch with a state-latching mechanism. Departing from micromirror-based reflection schemes, the device adopts a direct fiber-to-fiber coupling architecture to significantly enhance its capability to withstand high-energy optical power. The state-latching mechanism locks the actuator displacement after the removal of external voltage, thereby maintaining the optical path in the ON state with zero-power consumption. A theoretical model involving electrothermal-mechanical coupling is established, structural optimization and multibody coupled simulations are performed, and experimental verification is conducted. Experimental results demonstrate the successful realization of the state-latching and switching functions, with a transmission efficiency of 71% achieved (1.49 dB insertion loss) under a laser power of 3 W. This work has significant potential for providing a novel functional device in fields such as LIS and all-optical networks.