A non-invasive dry-transfer method for fabricating mesoscopic devices on sensitive materials
Abstract
Many materials with novel or exotic properties are highly sensitive to environmental factors such as air, solvents, and heat, which complicate device fabrication and limit their potential applications. Here, we present a universal sub-micrometer fabrication method for mesoscopic devices using a dry-transfer technique, tailored specifically for sensitive materials. This approach utilizes PMMA masks, combined with a water-dissoluble coating as a sacrificial layer, to ensure that sensitive materials are processed without exposure to harmful environmental conditions. The entire fabrication process is carried out in a glovebox, employing dry techniques that avoid air, solvents, and heat exposure, culminating in an encapsulation step. We demonstrate the utility of this method by fabricating and characterizing K2Cr3As3 and WTe2 devices, a one- and two-dimensional material, respectively. The results show that our technique preserves the integrity of the materials, provides excellent contact interfaces, and is broadly applicable to a range of sensitive materials.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (21)
Zhongmou Jia
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences 1 , Beijing 100190,
Yiwen Ma
Zhongchen Xu
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences 1 , Beijing 100190,
Xue Yang
Jianfei Xiao
College of Electronics and Information, Qingdao University 1 , Qingdao 266071,
Jiezhong He
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences 1 , Beijing 100190,
Yunteng Shi
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences 1 , Beijing 100190,
Zhiyuan Zhang
Duolin Wang
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences 1 , Beijing 100190,
Sicheng Zhou
Bingbing Tong
Peiling Li
Ziwei Dou
Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences 1 , Beijing 100190,
Xiaohui Song
Guangtong Liu
Jie Shen
Zhaozheng Lyu
Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences 1 , Beijing 100190,
Youguo Shi
Beijing National Laboratory for Condensed Matter Physics
Jiangping Hu
Li Lu
Fanming Qu
Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences 1 , Beijing 100190,