2D–3D heterointerface regulation of van der Waals epitaxy of AlN on graphene for wafer-scale exfoliation
Abstract
In this work, we present a three-step van der Waals epitaxy method to grow a transferable single-crystalline AlN membrane on untreated bilayer graphene by using two-dimensional (2D)/three-dimensional heterointerface regulation. Ultra-low V/III ratio in the first step greatly enables rapid mergence of quasi-2D AlN to protect the graphene from the damage in high-temperature and ammonia environments. Cyclic growth with different V/III ratios is introduced to release the strain in the second step, effectively alleviating the cracking problem of the subsequent AlN epilayer. Furthermore, we demonstrate the mechanical exfoliation of wafer-scale AlN epilayers and reveal the mechanism behind their controlled delamination. This work provides an effective strategy to realize free-standing AlN membrane on graphene with high quality and controllable delamination, laying a solid foundation for flexible deep ultraviolet device applications.
Article Details
Journal Info
Applied Physics Letters
American Institute of Physics
Authors (14)
Peng Liu
Yiwei Duo
Research and Development Center for Wide Bandgap Semiconductors, Institute of Semiconductors, Chinese Academy of Sciences 1 , Beijing 100083,
Wenze Wei
College of Energy, Soochow Institute for Energy and Materials Innovations, Jiangsu Provincial Key Laboratory for Advanced Carbon Materials and Wearable Energy Technologies, Soochow University 4 , 215006 Suzhou,
JiaXin Liu
Qichao Yang
Research and Development Center for Wide Bandgap Semiconductors, Institute of Semiconductors, Chinese Academy of Sciences 1 , Beijing 100083,
Jingnan Dong
Research and Development Center for Wide Bandgap Semiconductors, Institute of Semiconductors, Chinese Academy of Sciences 1 , Beijing 100083,
Zhaolong Chen
Jiankun Yang
Yiyun Zhang
Peng Gao
Junxi Wang
Jingyu Sun
Bio-X Institutes, Key Laboratory for the Genetics of Development and Neuropsychiatric Disorders (Ministry of Education), Center for Brain Health and Brain Technology, Global Institute of Future Technology, Institute of Psychology and Behavioral Science, Shanghai Jiao Tong University
Wenjie Wang
State Key Laboratory of Chemical Engineering and Low-Carbon Technology, School of Chemical Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, China
Tongbo Wei
Research and Development Center for Wide Bandgap Semiconductors, Institute of Semiconductors, Chinese Academy of Sciences 1 , Beijing 100083,