Nature Communications

Turing-patterned Ta2S3 enables sub-2 nm diffusion barrier for advanced Cu interconnects

X Xu Tian S Songjie Yang X Xiaoyu Liu (Optogenetics & Synthetic Biology Interdisciplinary Research Center, Shanghai Frontiers Science Center of Optogenetic Techniques for Cell Metabolism, School of Pharmacy, East China University of Science and Technology, 130 Mei Long Road, Shanghai 200237, China) Y Yupu Tang S Shanshan Ju R Renbo Lei J Jinxiong Li Y Yuancan Ding S Shengcheng Zhou J Juntong Kang Y Yuyang Qiao Y Yi Zhou R Runsheng Wang M Ming Li G Gaoda Chai X Xinwei Wang (Key Laboratory of Biotechnology and Bioresources Utilization of Ministry of Education)
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Article Details

Volume / Issue Vol. 17, Issue 1
Published April 08, 2026
ISSN 2041-1723
Publisher Nature Portfolio

Journal Info

Nature Communications

Nature Portfolio
ISSN: 2041-1723 Open Access Life Sciences

Authors (16)

X

Xu Tian

S

Songjie Yang

X

Xiaoyu Liu

Optogenetics & Synthetic Biology Interdisciplinary Research Center, Shanghai Frontiers Science Center of Optogenetic Techniques for Cell Metabolism, School of Pharmacy, East China University of Science and Technology, 130 Mei Long Road, Shanghai 200237, China

Y

Yupu Tang

S

Shanshan Ju

R

Renbo Lei

J

Jinxiong Li

Y

Yuancan Ding

S

Shengcheng Zhou

J

Juntong Kang

Y

Yuyang Qiao

Y

Yi Zhou

R

Runsheng Wang

M

Ming Li

G

Gaoda Chai

X

Xinwei Wang

Key Laboratory of Biotechnology and Bioresources Utilization of Ministry of Education

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