Self-supervised multi-resolution learning for label-agnostic morphology representation and clustering of semiconductor thin-film SEM defects
U
Umapathi Krishnamoorthy
C
Choon Kit Chan
C
Chandrakant Sonawane
A
Amol Vedpathak
S
Subhav Singh
D
Deekshant Varsheny
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 16, Issue 1
Published
April 03, 2026
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (6)
U
Umapathi Krishnamoorthy
C
Choon Kit Chan
C
Chandrakant Sonawane
A
Amol Vedpathak
S
Subhav Singh
D
Deekshant Varsheny
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