Investigation the CMP process of 6 H-SiC in H2O2 solution with ReaxFF molecular dynamics simulation
Y
Yanzhang Gu
K
Kaiping Feng
L
Lanxing Xu
L
Liang Zhao
T
Tianchen Zhao
B
Binghai Lyu
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
January 04, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (6)
Y
Yanzhang Gu
K
Kaiping Feng
L
Lanxing Xu
L
Liang Zhao
T
Tianchen Zhao
B
Binghai Lyu
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