Yanzhang Gu, Kaiping Feng, Lanxing Xu, Liang Zhao, Tianchen Zhao, Binghai Lyu. "Investigation the CMP process of 6 H-SiC in H2O2 solution with ReaxFF molecular dynamics simulation." Scientific Reports (2025). https://doi.org/10.1038/s41598-025-85536-8