Impact of electron cyclotron wave resonance plasma on defect reduction in ZnO thin films
K
Kota Hibino
J
Jiří Olejníček
K
Kohei Yamanoi
C
Carlito S. Ponseca
A
Ali Shuaib
Y
Yuki Maruyama
A
Aneta Písaříková
M
Michal Kohout
M
Martin Čada
A
Anna Kapran
Y
Yugo Akabe
N
Nobuhiko Sarukura
Z
Zdeněk Hubička
S
Shingo Ono
M
Marilou Cadatal-Raduban
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
February 14, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (15)
K
Kota Hibino
J
Jiří Olejníček
K
Kohei Yamanoi
C
Carlito S. Ponseca
A
Ali Shuaib
Y
Yuki Maruyama
A
Aneta Písaříková
M
Michal Kohout
M
Martin Čada
A
Anna Kapran
Y
Yugo Akabe
N
Nobuhiko Sarukura
Z
Zdeněk Hubička
S
Shingo Ono
M
Marilou Cadatal-Raduban
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