Highly uniform thermally undercut silicon photonic devices in a 300 mm CMOS foundry process

R Robert Parsons K Kaylx Jang Y Yuyang Wang (State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics, Tsinghua University) A Asher Novick A A. Matthew Smith C Christopher C. Tison Y Yonas Gebregiorgis V Venkatesh Deenadayalan M Matthew van Niekerk L Lewis Carpenter T Tat Ngai G Gerald Leake D Daniel Coleman X Xiang Meng (Department of Chemistry) S Stefan Preble M Michael L. Fanto K Keren Bergman A Anthony Rizzo