Journal of the American Chemical Society

Cycloalkyl Ligand-Engineered Zirconium–Oxo Clusters for Sub-9 nm Electron Beam Lithography with Ultralow Line Edge Roughness

M Min Zhang W Wenzheng Li (State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering) Z Zihan Lian (State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering) Z Zijian Chen (State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering) D Daohan Wang (State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering) X Xiaofeng Gong (State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering) J Jun Zhao (Department of Thoracic Oncology Beijing Cancer Hospital Beijing China) H Huie Zhu (Zhangjiang Laboratory, 100 Haike Road, Pudong New Area, Shanghai 201210, P. R. China) P Pengzhong Chen (State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering) X Xiaojun Peng (Dalian University of Technology , , 2 Linggong Road , ,)
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Article Details

Volume / Issue Vol. 148, Issue 25
Published July 01, 2026
Pages 25779-25787
ISSN 0002-7863
Publisher American Chemical Society

Journal Info

Journal of the American Chemical Society

American Chemical Society
ISSN: 0002-7863 Physical Sciences

Authors (10)

M

Min Zhang

W

Wenzheng Li

State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering

Z

Zihan Lian

State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering

Z

Zijian Chen

State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering

D

Daohan Wang

State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering

X

Xiaofeng Gong

State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering

J

Jun Zhao

Department of Thoracic Oncology Beijing Cancer Hospital Beijing China

H

Huie Zhu

Zhangjiang Laboratory, 100 Haike Road, Pudong New Area, Shanghai 201210, P. R. China

P

Pengzhong Chen

State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering

X

Xiaojun Peng

Dalian University of Technology , , 2 Linggong Road , ,

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