3D nanolithography with metalens arrays and spatially adaptive illumination
S
Songyun Gu
C
Chenkai Mao
A
Anna Guell Izard
S
Sarvesh Sadana
D
Dongping Terrel-Perez
M
Magi Mettry-Yassa
W
Wonjin Choi
W
Wenjie Zhou
H
Hujie Yan
Z
Ziran Zhou
T
Travis Massey
A
Alex Abelson
Y
You Zhou
S
Sijia Huang
C
Chiara Daraio
T
Thejaswi Umanath Tumkur
J
Jonathan A. Fan
X
Xiaoxing Xia
Article Details
Journal
Nature
Volume / Issue
Vol. 648, Issue 8094
Published
December 18, 2025
Pages
591-599
ISSN
0028-0836
Publisher
Nature Portfolio
Authors (18)
S
Songyun Gu
C
Chenkai Mao
A
Anna Guell Izard
S
Sarvesh Sadana
D
Dongping Terrel-Perez
M
Magi Mettry-Yassa
W
Wonjin Choi
W
Wenjie Zhou
H
Hujie Yan
Z
Ziran Zhou
T
Travis Massey
A
Alex Abelson
Y
You Zhou
S
Sijia Huang
C
Chiara Daraio
T
Thejaswi Umanath Tumkur
J
Jonathan A. Fan
X
Xiaoxing Xia
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