3D nanolithography with metalens arrays and spatially adaptive illumination - Songyun Gu; Chenkai Mao; Anna Guell Izard; Sarvesh Sadana; Dongping Terrel-Perez; Magi Mettry-Yassa; Wonjin Choi; Wenjie Zhou; Hujie Yan; Ziran Zhou; Travis Massey; Alex Abelson; et al. (Nature, 2025)