White-light colorimetric interferometry for measurement of thickness and topography on semiconductor structures
J
Jaeseung Im
H
Heewoo Lee
K
Kyeongjun Jang
S
Soobong Choi
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
November 25, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (4)
J
Jaeseung Im
H
Heewoo Lee
K
Kyeongjun Jang
S
Soobong Choi
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