Wafer‐Scale Dry‐Transfer of Single‐Crystalline Transition Metal Dichalcogenides
Abstract
AbstractThe twisting and stacking of 2D materials have emerged as transformative strategies for discovering novel physical phenomena and designing advanced materials and devices. A significant challenge, however, is achieving pristine interfaces with precise angular control while maintaining the long‐range order over large areas. In this work, a novel dry‐transfer method is presented that enables the ultra‐clean integration of epitaxial, single‐crystalline transition metal dichalcogenides (TMDCs) via vacuum thermocompression bonding (VTCB). This technique facilitates the fabrication of wafer‐scale twisting and stacking of single‐crystalline TMDCs to form homo‐and heterostructures with intrinsic material properties and precise angular control. The layer‐by‐layer reconstruction of single‐crystalline multilayer 2H‐and 3R‐MoS2 is demonstrated, with structural, electrical, and optical properties comparable to those of the bulk counterpart. Furthermore, the approach is fully compatible with standard semiconductor fabrication workflows and equipment, offering a scalable pathway for automated high‐throughput fabrication. This findings provide a new avenue for the large‐scale production of multi‐stacked materials and twist‐electronic device arrays.
Article Details
Authors (12)
Jichuang Shen
Research Center for Industries of the Future Westlake University Hangzhou Zhejiang 310030 China
Xiang Xu
Wenhao Li
Tong Jiang
Xuechun Sun
School of Engineering
Han Chen
GBRCE for Functional Molecular Engineering, LIFM, IGCME, School of Chemistry
Chen Ji
From the Warwick Medical School, Clinical Trials Unit, University of Warwick (K.C., C.J., J.P.N., J.B.L., J.M.M., F.M., C.N., H.N., A.-M.S., M.A.S., K.R.S., S.W., R.L., G.D.P.), and the Critical Care Unit, University Hospital Coventry and Warwickshire NHS Trust (M.A.S.), Coventry, Devon Air Ambulance (N.L., B.T.) and South Western Ambulance Service NHS Foundation Trust (R.O., S.W.), Exeter, East Midlands Ambulance Service NHS Trust, Nottingham (R.E.S.S., G.L.S., G.A.W.), East of England Ambulance Service NHS Trust, Cambridge (S.B., T.F.), Kingston University (T.Q.) and London Ambulance Service NHS Trust (R.T.F., J.K., J.F., A.M.-S.), London, North East Ambulance Service NHS Foundation Trust, Newcastle upon Tyne (K.C., E.B., M.L.), North West Ambulance Service NHS Trust, Bolton (S.B., A. Wright, M.W.), South Central Ambulance Service NHS Foundation Trust, Bicester (C.D.D., M.B., A.C., V.D.), South East Coast Ambulance Service NHS Foundation Trust, Crawley (G.B., J.W.), Welsh Ambulance Services University NH...
Lida Yu
School of Engineering Westlake University Hangzhou 310030 China
Jingnan Dong
Research and Development Center for Wide Bandgap Semiconductors, Institute of Semiconductors, Chinese Academy of Sciences 1 , Beijing 100083,
Tongbo Wei
Research and Development Center for Wide Bandgap Semiconductors, Institute of Semiconductors, Chinese Academy of Sciences 1 , Beijing 100083,
Huaze Zhu
Ji Hua Laboratory
Wei Kong