Wafer-scale high-κ HfO2 dielectric films with sub-5-Å equivalent oxide thickness for 2D MoS2 transistors

S Songge Zhang T Tao Zhang H Hua Yu T Tong Li X Xiuzhen Li C Chenyang Cui Y Yuchao Zhou H Hailing Guo S Shuopei Wang D Dongfeng Zheng L Liangfeng Huang (Shanghai Key Laboratory of Anesthesiology and Brain Functional Modulation, Clinical Research Center for Anesthesiology and Perioperative Medicine, Translational Research Institute of Brain and Brain-Like Intelligence, Department of Anesthesiology and Perioperative medicine, Shanghai Fourth People’s Hospital, School of Medicine, Tongji University) L Liqi Bai S Su Liu C Cheng Shen W Wei Yang L Luojun Du D Dongxia Shi L Lede Xian X Xiaoming Tao Y Yang Chai N Na Li G Guangyu Zhang