Wafer-scale formation of MoS2 with controlled thickness and high uniformity via conversion of MoOx using H2S sulfurization and subsequent crystallization
N
Naoya Okada
S
Shinichi Tanabe
H
Hitoshi Miura
H
Hao Cheng
Y
Yumin Huang
H
Hisashi Warashina
A
Atsuki Fukazawa
H
Hiroki Maehara
T
Toshifumi Irisawa
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 16, Issue 1
Published
February 05, 2026
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (9)
N
Naoya Okada
S
Shinichi Tanabe
H
Hitoshi Miura
H
Hao Cheng
Y
Yumin Huang
H
Hisashi Warashina
A
Atsuki Fukazawa
H
Hiroki Maehara
T
Toshifumi Irisawa
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