Unlocking Wafer‐Scale 3D Photonic Systems With Ion‐Beam‐Induced Origami
Abstract
ABSTRACT Scalable manufacturing of three‐dimensional (3D) micro‐/nano‐architectures with nanometric precision remains a pivotal challenge in photonics. Here, we introduce a parallel broad‐beam ion beam etching (IBE) technique that decouples this fundamental trade‐off, enabling the simultaneous and uniform transformation of two‐dimensional (2D) patterns into well‐defined 3D geometries across entire 4‐inch wafers. The IBE platform achieves angular uniformity exceeding 97% and reduces fabrication time by over two orders of magnitude compared to serial focused‐ion‐beam (FIB) methods. Leveraging this approach, we fabricate two distinct functional devices: a chiral 3D bending metasurface with a giant experimental circular dichroism of 0.8 in the mid‐infrared, and a collectively buckled plasmonic grating whose resonance is dynamically tunable over 150 nm in the visible spectrum via curvature control. This technology uniquely combines nanoscale precision with wafer‐scale throughput, enabling the construction of 3D metasurfaces via meta‐atom assembly and the global modulation of optical responses. Our work establishes a versatile platform that bridges the gap between design complexity and scalable manufacturing for next‐generation 3D integrated photonics.
Article Details
Authors (17)
Yi Wang
Ruixuan Zheng
New Cornerstone Science Laboratory Department of Physics University of Hong Kong Hong Kong China
Cai Luo
Key Laboratory for Microstructural Material Physics of Hebei Province, School of Science, Yanshan University 1 , Qinhuangdao 066004,
Ziyi Fu
Key Laboratory for Microstructural Material Physics of Hebei Province, School of Science, Yanshan University 1 , Qinhuangdao 066004,
Nannan Hu
Enbo Gao
Beijing National Laboratory For Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing China
Gaojing Liu
Peng Bao
Weikang Fang
Beijing National Laboratory For Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing China
Aizi Jin
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences 2 , Beijing 100190,
Baoli Liu
Education and Research Department, Beijing Changier Education Foundation
Baogang Quan
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences 2 , Beijing 100190,
Geng Li
Department of Chemistry, State Key Laboratory of Marine Pollution, City University of Hong Kong, Hong Kong 999077, P. R. China
Xiaofeng Fan
Sha Hu
College of Physics, Henan University of Technology 3 , Zhengzhou 450001,
Yang Guo
Department of Materials Science and Engineering, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon 999077, Hong Kong SAR, China
Changzhi Gu
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences 2 , Beijing 100190,