Ultrahigh dielectric permittivity in Hf0.5Zr0.5O2 thin-film capacitors
W
Wen Di Zhang
Z
Zi Zheng Song
S
Shu Qi Tang
J
Jin Chen Wei
Y
Yan Cheng
(Key Laboratory of Polar Materials and Devices (MOE), School of Information and Electronic Engineering (School of Integrated Circuits Science and Engineering), East China Normal University, Shanghai, China.)
B
Bing Li
S
Shi You Chen
Z
Zi Bin Chen
A
An Quan Jiang
Article Details
Journal
Nature Communications
Volume / Issue
Vol. 16, Issue 1
Published
March 18, 2025
ISSN
2041-1723
Publisher
Nature Portfolio
Authors (9)
W
Wen Di Zhang
Z
Zi Zheng Song
S
Shu Qi Tang
J
Jin Chen Wei
Y
Yan Cheng
Key Laboratory of Polar Materials and Devices (MOE), School of Information and Electronic Engineering (School of Integrated Circuits Science and Engineering), East China Normal University, Shanghai, China.
B
Bing Li
S
Shi You Chen
Z
Zi Bin Chen
A
An Quan Jiang
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