Ultrafast charge emission at terahertz frequency in high-intensity femtosecond laser ablation process

R Ryo Tamaki (Department of Physics, Graduate School of Engineering Science, Yokohama National University 1 , 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501,) R Ryoya Goto (Department of Physics, Graduate School of Engineering Science, Yokohama National University 1 , 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501,) R Rikuto Watanabe K Koki Kumagai (Department of Physics, Graduate School of Engineering Science, Yokohama National University 1 , 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501,) M Marvin A. Weiss (Semiconductor and Quantum Integrated Electronics Research Center (SQIE), Institute for Multidisciplinary Sciences, Yokohama National University 4 , 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501,) H Hirokazu Tahara (Department of Physics, Graduate School of Engineering Science) J Jun Takeda G Gaku Asai (Nikon Corporation 6 , 1-5-20, Nishioi, Shinagawa-ku, Tokyo 140-8601,) Y Yuichi Takigawa (Nikon Corporation 6 , 1-5-20, Nishioi, Shinagawa-ku, Tokyo 140-8601,) I Ikufumi Katayama

Abstract

Initial charge emission processes during femtosecond laser ablation are investigated by monitoring the waveforms of terahertz radiation in real time using echelon-based single-shot terahertz time-domain spectroscopy and by measuring the ablated depth profiles using spectral domain optical coherence tomography. High sensitivity of the single-shot terahertz detection system enabled the acquisition of full pulse-to-pulse terahertz waveforms and revealed the changes in the amplitude and phase of the emitted terahertz waves due to the different fundamental processes of laser ablation at femtosecond and picosecond timescales. At low fluence close to the ablation threshold, a cosinusoidal terahertz wave is observed, indicating that the electrons are emitted from the surface, inducing damages to the material and causing incubation of the ablation process. At medium fluence, the terahertz wave changes to sinusoidal, suggesting that electron emissions are soon screened and are accompanied by material removal. At high fluence, time-delayed high-intensity terahertz radiation is observed as a signature of secondary charge emission. The waveform and the comparison with the ablated depth profiles reveal the importance of acoustic wave generation due to rapid lattice heating, demonstrating the importance of monitoring the initial charge dynamics for understanding the subsequent laser ablation processes.

Article Details

Volume / Issue Vol. 140, Issue 4
Published July 28, 2026
ISSN 0021-8979
Publisher American Institute of Physics

Journal Info

Journal of Applied Physics

American Institute of Physics

ISSN: 0021-8979 Physical Sciences

Authors (10)

R

Ryo Tamaki

Department of Physics, Graduate School of Engineering Science, Yokohama National University 1 , 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501,

R

Ryoya Goto

Department of Physics, Graduate School of Engineering Science, Yokohama National University 1 , 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501,

R

Rikuto Watanabe

K

Koki Kumagai

Department of Physics, Graduate School of Engineering Science, Yokohama National University 1 , 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501,

M

Marvin A. Weiss

Semiconductor and Quantum Integrated Electronics Research Center (SQIE), Institute for Multidisciplinary Sciences, Yokohama National University 4 , 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501,

H

Hirokazu Tahara

Department of Physics, Graduate School of Engineering Science

J

Jun Takeda

G

Gaku Asai

Nikon Corporation 6 , 1-5-20, Nishioi, Shinagawa-ku, Tokyo 140-8601,

Y

Yuichi Takigawa

Nikon Corporation 6 , 1-5-20, Nishioi, Shinagawa-ku, Tokyo 140-8601,

I

Ikufumi Katayama