Thickness-dependent structural evolution of a-C:H layers formed by one-step Ar/CH4 plasma reduction for direct Cu bonding
H
Hoogwan Lee
S
Sarah Eunkyung Kim
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 16, Issue 1
Published
April 24, 2026
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (2)
H
Hoogwan Lee
S
Sarah Eunkyung Kim
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