Structural, optical and electrical properties of Si-rich and N-rich PECVD silicon nitride films
T
Tania Al Moussi
C
Cian O’Dalaigh
P
Patrice Raynaud
J
Jerome Esvan
P
Paul Lambkin
R
Ramji Lakshmanan
B
Baoxing Chen
S
Sombel Diaham
Article Details
Journal
Scientific Reports
Volume / Issue
Vol. 15, Issue 1
Published
September 29, 2025
ISSN
2045-2322
Publisher
Nature Portfolio
Authors (8)
T
Tania Al Moussi
C
Cian O’Dalaigh
P
Patrice Raynaud
J
Jerome Esvan
P
Paul Lambkin
R
Ramji Lakshmanan
B
Baoxing Chen
S
Sombel Diaham
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