Spatially‐Controlled Planar Guided Crystallization of Low‐Loss Phase Change Materials for Programmable Photonics
Abstract
Abstract Photonic integrated devices are progressively evolving beyond passive components into fully programmable systems, notably driven by the progress in chalcogenide phase‐change materials (PCMs) for non‐volatile reconfigurable nanophotonics. However, the stochastic nature of their crystal grain formation results in strong spatial and temporal crystalline inhomogeneities. Here, the concept of spatially‐controlled planar guided crystallization is proposed, a novel method for programming the growth of optically homogeneous low‐loss Sb 2 S 3 PCM, leveraging the seeded directional and progressive crystallization within confined channels. This guided crystallization method is experimentally shown to circumvent the current limitations of conventional PCM‐based nanophotonic devices, including a multilevel non‐volatile optical phase‐shifter exploiting a silicon nitride‐based Mach–Zehnder interferometer, and a programmable metasurface with spectrally reconfigurable bound state in the continuum. Precisely controlling the growth of PCMs to ensure optically uniform crystalline properties across devices is the cornerstone for the industrial development of non‐volatile reconfigurable photonic integrated circuits.
Article Details
Authors (17)
Fouad Bentata
CNRS, Ecole Centrale de Lyon, INSA Lyon Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 Ecully 69130 France
Arnaud Taute
CNRS, Ecole Centrale de Lyon, INSA Lyon Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 Ecully 69130 France
Capucine Laprais
CNRS, Ecole Centrale de Lyon, INSA Lyon, Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 , 69130 Ecully,
Régis Orobtchouk
CNRS, Ecole Centrale de Lyon, INSA Lyon Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 Ecully 69130 France
Eva Kempf
STMicroelectronics 850 Rue Jean Monnet Crolles 38920 France
Alban Gassenq
Universite Claude Bernard Lyon 1, CNRS Institut Lumière Matière, UMR5306 Villeurbanne F‐69100 France
Yves Pipon
Univ. Claude Bernard Lyon 1 ‐ CNRS/IN2P3 IP2I (UMR 5822) Villeurbanne 69622 France
Michele Calvo
STMicroelectronics 850 Rue Jean Monnet Crolles 38920 France
Valérie Martinez
Universite Claude Bernard Lyon 1, CNRS Institut Lumière Matière, UMR5306 Villeurbanne F‐69100 France
Stéphane Monfray
STMicroelectronics 850 Rue Jean Monnet Crolles 38920 France
Guillaume Saint‐Girons
CNRS, Ecole Centrale de Lyon, INSA Lyon Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 Ecully 69130 France
Nicolas Baboux
CNRS, Ecole Centrale de Lyon, INSA Lyon, Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 , 69130 Ecully,
Hai Son Nguyen
CNRS, Ecole Centrale de Lyon, INSA Lyon Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 Ecully 69130 France
Xavier Letartre
CNRS, Ecole Centrale de Lyon, INSA Lyon Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 Ecully 69130 France
Lotfi Berguiga
CNRS, Ecole Centrale de Lyon, INSA Lyon, Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 , 69130 Ecully,
Patrice Genevet
Sebastien Cueff
Université Lyon, Ecole Centrale de Lyon, CNRS, INSA Lyon, Université Claude Bernard Lyon 1, CPE Lyon, CNRS, INL, UMR5270 4 , 69130 Ecully,