Single-exposure holographic lithography of ultra-high aspect-ratio microstructures
D
Dajun Lin
B
Brian Baker
R
Rajesh Menon
Article Details
Journal
Nature Communications
Volume / Issue
Vol. 17, Issue 1
Published
June 04, 2026
ISSN
2041-1723
Publisher
Nature Portfolio
Authors (3)
D
Dajun Lin
B
Brian Baker
R
Rajesh Menon
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